Intel Has Increased Its Orders of ASML’s High-NA Equipment for 14A Chips

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Intel has reportedly increased its orders of High-NA equipment from the Dutch chipmaker, ASML, planning to utilize these machines for its 14A process node.

Intel Now Purchases Two Units of ASML’s High-NA Equipment, Focusing on Next-Gen Nodes

ASML’s High-NA equipment is considered the ‘holy grail’ in chip manufacturing due to its high quality lithography and substantial cost. According to an analysis by Jerry Capital on X, Intel has plans to acquire two High-NA EUV machines from ASML, up from a single unit previously ordered. This move indicates that Intel intends to significantly ramp up its expenditure for upcoming processes.

“We raise our CY27E low-NA EUV units from 52 to 56 driven by 2 additional units for Intel (5 vs 3) and 2 additional units for Samsung (7 vs 5). We also raise our CY27E high- NA units from 8 to 10 with Intel increased from 1 to 2 and SK Hynix increased from 1 to 2.” $ASML pic.twitter.com/yygwDnjwv9

— Jerry Capital (@JerryCap) September 23, 2025

Intel’s 14A process is expected to feature high-NA lithography. This will be a significant milestone for the foundry division, as the success of this node is critical for Intel’s future plans. If Intel’s 14A node fails to gain substantial customer interest, the company may drop out of the high-end chip race. Thus, the 14A process represents a ‘do-or-die’ moment for Intel Foundry Services (IFS). Currently, ASML’s High-NA EUV equipment has been adopted by TSMC, Samsung, SK Hynix, and now Intel, with plans for next-gen products.

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A single unit of ASML’s machinery is estimated to cost around $370 million. Intel may spend between $1 billion and $2 billion on lithography equipment alone for the 14A process. In a previous report, we discussed how ASML will be shipping a significant portion of its High-NA EUV machines to Intel, making Intel one of the dominant adopters of this technology. As Intel aims for a phenomenal release with 14A, the foundry capital expenditure (CapEX) around this process is expected to grow significantly.

It will be interesting to see if Intel can successfully execute processes like 14A and 18A, as these nodes are crucial for sustaining the company’s foundry division and its broader American chipmaking ambitions.

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